DocumentCode :
759868
Title :
Surface tension-powered self-assembly of microstructures - the state-of-the-art
Author :
Syms, Richard R A ; Yeatman, Eric M. ; Bright, Victor M. ; Whitesides, George M.
Author_Institution :
Opt. & Semicond. Devices Group, Imperial Coll., London, UK
Volume :
12
Issue :
4
fYear :
2003
Firstpage :
387
Lastpage :
417
Abstract :
Because of the low dimensional power of its force scaling law, surface tension is appropriate for carrying out reshaping and assembly in the microstructure size domain. This paper reviews work on surface tension powered self-assembly of microstructures. The existing theoretical approaches for rotational assembly are unified. The demonstrated fabrication processes are compared. Mechanisms for accurately determining the assembled shape are discussed, and the limits on accuracy and structural distortion are considered. Applications in optics, electronics and mechanics are described. More complex operations (including the combination of self-assembly and self-organization) are also reviewed.
Keywords :
micromechanical devices; self-assembly; surface tension; microelectromechanical system; microstructure fabrication; rotational assembly; self-assembly; self-organization; surface tension; Assembly; Biomedical optical imaging; Micromechanical devices; Microstructure; Optical devices; Optical distortion; Optical waveguides; Self-assembly; Shape; Surface tension;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2003.811724
Filename :
1219507
Link To Document :
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