Title :
Silicon subminiature microphones with organic piezoelectric layers-fabrication and acoustical behavior
Author :
Schellin, Ralf ; Hess, G. ; Kuehnel, W. ; Sessler, G.M. ; Fukada, E.
Author_Institution :
Inst. for Electroacoustics, Tech. Univ., Darmstadt, Germany
Abstract :
A silicon subminiature microphone, based on the piezoelectric effect of organic films such as aromatic polyurea, PVDF, and PVDF/TrFE, is proposed. The acoustical sensor is fabricated using a slightly modified integrated circuit technology process and a standard micromechanical fabrication procedure. The main production steps of this hybrid sensor are given, including the fabrication of the mechanical part of the sensor, the deposition or spin coating of the films, and the poling of the polymer layers. Measurements of the transverse piezoelectric charge constant d 31 yield values up to >
Keywords :
micromechanical devices; microphones; piezoelectric devices; piezoelectric materials; polymer films; silicon; PVDF; PVDF/TrFE; Si microphones; acoustical behavior; aromatic polyurea; fabrication; film spin coating; hybrid sensor; micromechanical fabrication procedure; modified integrated circuit technology process; piezoelectric organic films; polymer layer poling; production steps; sound sensitivity; subminiature microphone; transverse piezoelectric charge constant; Acoustic measurements; Acoustic sensors; Fabrication; Mechanical sensors; Microphones; Piezoelectric effect; Piezoelectric films; Polymer films; Semiconductor films; Silicon;
Journal_Title :
Electrical Insulation, IEEE Transactions on
