Title :
Novel Three-Dimensional Beam Tracking System for Stationary-Sample-Type Atomic Force Microscopy
Author :
Hung, Shao-Kang ; Fu, Li-Chen
Author_Institution :
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei
Abstract :
The stationary-sample (scanning-probe)-type atomic force microscope (AFM) has been demonstrated to have many advantages over its conventional counterpart: the scanning-sample (stationary-probe)-type AFM. However, its major challenge is to measure the deflection of the probe while moving in three-dimensional (3-D) space. Utilizing a distinctively arranged correction lens in the optomechatronic integrated design, this paper proposes a novel laser beam tracking system to overcome the aforementioned challenge. An innovative method to minimize "false deflection" is devised. This system has been verified to achieve high scanning speed without sacrificing high tracking accuracy
Keywords :
laser beams; laser variables measurement; optical variables measurement; position measurement; scanning probe microscopy; 3D laser beam tracking system; atomic force microscopy; correction lens; deflection measurement; false deflection; optical position measurement; optomechatronic integrated design; scanning probe microscope; Atomic beams; Atomic force microscopy; Atomic measurements; Biomedical optical imaging; Force measurement; Laser beams; Lenses; Optical microscopy; Probes; Tracking; Atomic force microscope (AFM); nanotopography; optical position measurement; optomechatronics; scanning probe microscope (SPM);
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.2006.881571
