Multiport S-Parameter Measurements of Linear Circuits With Open Ports

Author

Reimann, Klaus ; Kiewitt, Rainer ; Matters-Kammerer, Marion ; Pietig, Rainer

Author_Institution

Philips Res., Eindhoven

Volume

55

Issue

5

fYear

2006

Firstpage

1767

Lastpage

1771

Abstract

A simple technique to measure the S-parameters of a linear multiport with a two-port network analyzer is evaluated. Just two probes and a single specimen are required. All two-port combinations are measured with the other ports left open. Special care was taken to estimate the maximum measurement uncertainties and to identify critical parameter values. Results can be further improved by using a simplified weighting scheme or by correcting for open-port capacitances. The technique is especially suited for wafer probes

Keywords

S-parameters; linear network analysis; measurement uncertainty; network analysers; semiconductor device measurement; semiconductor device testing; two-port networks; S-parameter measurements; critical parameter value identification; impedance measurement; linear circuits; measurement errors; measurement uncertainty; microwave measurements; multiport circuits; on-wafer testing; open ports; scattering parameters measurement; two-port network analyzer; wafer probes; Capacitance; Circuit testing; Impedance measurement; Linear circuits; Measurement errors; Measurement uncertainty; Microwave circuits; Microwave measurements; Probes; Scattering parameters; Impedance measurement; linear circuits; measurement errors; microwave measurements; multiport circuits; on-wafer testing; scattering parameters measurement;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/TIM.2006.880298

Filename

1703928