TCAD Methodology for Design of SCR Devices for Electrostatic Discharge (ESD) Applications

Author

Salcedo, Javier A. ; Liou, Juin J. ; Liu, Zhiwei ; Vinson, James E.

Author_Institution

Corporate ESD Group, Analog Devices, Wilmington , MA

Volume

54

Issue

4

fYear

2007

fDate

4/1/2007 12:00:00 AM

Firstpage

822

Lastpage

832

Abstract

Realization of on-chip electrostatic discharge (ESD) protection requires extensive technical experience and know-how. A technology computer-aided design (TCAD) methodology aimed to assist in the design and implementation of robust ESD devices is developed and presented. The methodology provides a systematic and practical means for the evaluation and optimization of ESD devices in a simulation environment. Advanced silicon-controlled-rectifier devices are considered to illustrate the approach, and experimental data measured from these devices are also included in support of the TCAD development

Keywords

electrostatic discharge; technology CAD (electronics); thyristors; SCR devices design; TCAD; blocking junction; on-chip electrostatic discharge protection; silicon-controlled-rectifier devices; technology computer-aided design methodology; trigger voltage; Application software; Circuits; Computational modeling; Design automation; Design methodology; Electrostatic discharge; Protection; Rectifiers; Robustness; Thyristors; Blocking junction; computer-aided design; electrostatic discharge (ESD); silicon-controlled rectifier (SCR); trigger voltage;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/TED.2007.891251

Filename

4142904