Title :
A simplified method for calculation of the impedance of an induction plasma
Author :
Chentouf, A. ; Fouladgar, J. ; Develey, G.
Author_Institution :
LRTI-CRTT, Saint Nazaire, France
fDate :
5/1/1995 12:00:00 AM
Abstract :
A program for PC was developed to calculate the impedance of an RF plasma at the output of the generator. An exponential distribution of current density is assumed inside the inductor. The solution of the electromagnetic equation in the inductor is then associated with the finite-difference method inside the plasma. The finite-difference electromagnetic and heat transfer equations are obtained by the control volume formulations
Keywords :
current density; finite difference methods; inductors; physics computing; plasma heating; plasma radiofrequency heating; plasma torches; RF generator; RF plasma; control volume formulations; current density; electromagnetic equation; finite-difference method; heat transfer equations; impedance calculation; induction plasma; Current density; Electromagnetic heating; Electromagnetic induction; Equations; Exponential distribution; Finite difference methods; Impedance; Inductors; Plasma density; Radio frequency;
Journal_Title :
Magnetics, IEEE Transactions on
