Title :
3-D computer aided analysis of the "Berkeley" electrostatic micromotor
Author :
Wiak, S. ; Di Barba, P. ; Savini, A.
Author_Institution :
Inst. of Electr. Machines & Transformers, Tech. Univ. Lodz, Poland
fDate :
5/1/1995 12:00:00 AM
Abstract :
The basic ideas of IC-processed electrostatics are reviewed. The three-dimensional field model of a variable-capacitance electrostatic micromotor is then presented and the underlying analysis problem is solved by means of the finite element method. The micromotor, acting as a position actuator, is investigated at steady state and particular attention is paid in the calculation of the torque-angle curve featuring the device. The influence of stator geometry on the electromechanical performance is also investigated and design considerations are accordingly drawn. Finally, the step-transient response of the actuator is simulated.
Keywords :
electric machine analysis computing; electrostatic devices; finite element analysis; machine theory; microactuators; micromotors; 3D computer aided analysis; Berkeley electrostatic micromotor; IC-processed electrostatics; electromechanical performance; finite element method; position actuator; stator geometry; steady state; step-transient response; three-dimensional field model; torque-angle curve; variable-capacitance micromotor; Actuators; Computer aided analysis; Dielectric substrates; Electrostatics; Finite element methods; Geometry; Micromotors; Rotors; Stators; Teeth;
Journal_Title :
Magnetics, IEEE Transactions on
