Title :
The Beenakker´s Cavity for Uniform Column of Nonequilibrium Argon Plasma Generation: Experiment and 3-D Modeling
Author :
Tatarinov, Alexey V. ; Epstein, I.L. ; Lebedev, Y.A. ; Cvejic, M. ; Jovicevic, S. ; Konjevic, N.
Author_Institution :
Topchiev´s Inst. of Petrochem. Synthesis, Moscow, Russia
Abstract :
In this experiment, a uniform column of nonequilibrium argon plasma (p = 0.5 torr) generated by the Beenakker´s cavity has been studied and self-consistent nonlocal 3-D modeling has been applied. The results of modeling allowed explaining uniformity of long plasma column outside of the cavity. It is found that the nonlocality provides axial homogeneity of such parameters as mean energy density of electrons and concentrations of all plasma particles. Images of plasma properties are presented.
Keywords :
argon; high-frequency discharges; plasma density; plasma diagnostics; plasma simulation; plasma sources; Ar; Beenakker cavity; electron mean energy density; nonequilibrium argon plasma generation; plasma column; plasma particle concentrations; plasma properties; pressure 0.5 torr; self-consistent nonlocal 3D modeling; Argon; Cavity resonators; Electron tubes; Mathematical model; Microwave imaging; Optical resonators; Plasmas; Elementary particle exchange interactions; microwave propagation; plasma diagnostics; plasma simulation; plasma sources; plasma sources.;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2014.2328017
