Title :
CMOS-compatible optical rib waveguides defined by local oxidation of silicon
Author :
Rowe, L.K. ; Elsey, M. ; Tarr, N.G. ; Knights, A.P. ; Post, E.
Author_Institution :
Dept. of Electron., Carleton Univ., Ont.
Abstract :
The local oxidation of silicon process is shown to be an effective means of defining optical rib waveguides in silicon on insulator while maintaining the surface planarity required for CMOS integration. Experimental waveguides have shown singlemode operation and losses of less than 1 dB/cm in the telecommunications band around 1550 nm
Keywords :
CMOS integrated circuits; optical waveguides; rib waveguides; silicon-on-insulator; CMOS integration; local oxidation; optical rib waveguides; silicon on insulator; single mode operation; surface planarity;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20073680
