Title :
Equilibrium characteristics of strong ion sheaths in a partially ionized plasma
Author :
Mukherjee, S. ; John, P.I.
Author_Institution :
Inst. for Plasma Res., Gandhinagar, India
fDate :
4/1/1995 12:00:00 AM
Abstract :
Experiments have been carried out to study the equilibrium characteristics of strong ion sheaths (eΦ/Te≫1) in a partially ionized argon plasma. An improved method of potential measurement in the sheath is described. The potential profile shows deviations from Child´s law and the reduction of sheath size with pressure. Energy analysis of ions reaching the negative biased electrode show that the ions are not monoenergetic but have a spread in energies which depends on neutral pressure
Keywords :
argon; plasma collision processes; plasma diagnostics; plasma sheaths; Ar; Ar plasma; Child´s law; equilibrium properties; ion energy; partially ionized plasma; potential measurement; pressure; sheath size; strong ion sheaths; Electrodes; Electrons; Plasma accelerators; Plasma density; Plasma immersion ion implantation; Plasma materials processing; Plasma measurements; Plasma properties; Plasma sheaths; Plasma sources;
Journal_Title :
Plasma Science, IEEE Transactions on
