• DocumentCode
    764319
  • Title

    Equilibrium characteristics of strong ion sheaths in a partially ionized plasma

  • Author

    Mukherjee, S. ; John, P.I.

  • Author_Institution
    Inst. for Plasma Res., Gandhinagar, India
  • Volume
    23
  • Issue
    2
  • fYear
    1995
  • fDate
    4/1/1995 12:00:00 AM
  • Firstpage
    133
  • Lastpage
    137
  • Abstract
    Experiments have been carried out to study the equilibrium characteristics of strong ion sheaths (eΦ/Te≫1) in a partially ionized argon plasma. An improved method of potential measurement in the sheath is described. The potential profile shows deviations from Child´s law and the reduction of sheath size with pressure. Energy analysis of ions reaching the negative biased electrode show that the ions are not monoenergetic but have a spread in energies which depends on neutral pressure
  • Keywords
    argon; plasma collision processes; plasma diagnostics; plasma sheaths; Ar; Ar plasma; Child´s law; equilibrium properties; ion energy; partially ionized plasma; potential measurement; pressure; sheath size; strong ion sheaths; Electrodes; Electrons; Plasma accelerators; Plasma density; Plasma immersion ion implantation; Plasma materials processing; Plasma measurements; Plasma properties; Plasma sheaths; Plasma sources;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/27.376577
  • Filename
    376577
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=764319