Title :
AlN film SAW resonator integrated with metal structure
Author :
Lin Shu ; Jianying Jiang ; Bin Peng ; Yu Wang ; Xingzhao Liu
Author_Institution :
Univ. of Electron. Sci. & Technol. of China, Chengdu, China
Abstract :
A novel surface acoustic wave (SAW) resonator integrated on a metal substrate is presented. The devices were fabricated on the aluminium nitride (AlN) thin films deposited by mid-frequency magnetron sputtering on polished TC4 titanium alloy substrates. Using a two-step growth method, AlN film with a full-width at half-maximum of 4.1° had been prepared. The AlN film SAW resonator shows a resonance frequency of 129 MHz and an electromechanical coupling coefficient of 0.28%. The measurement results agree well with the simulation results. This integrated SAW resonator can be used as a good strain sensor in metal structure health monitoring.
Keywords :
aluminium compounds; sputter deposition; surface acoustic wave resonators; thin film devices; titanium alloys; wide band gap semiconductors; AlN; TC4 titanium alloy substrates; aluminium nitride thin films; electromechanical coupling coefficient; frequency 129 MHz; integrated SAW resonator; metal structure health monitoring; metal substrate; midfrequency magnetron sputtering; resonance frequency; strain sensor; surface acoustic wave resonator;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2014.3495
