DocumentCode
76487
Title
Surface Hydrophilization of Polyimide Films Using Atmospheric Damage-Free Multigas Plasma Jet Source
Author
Takamatsu, Takahiro ; Hirai, Hirokazu ; Sasaki, Ryoichi ; Miyahara, Hidekazu ; Okino, A.
Author_Institution
Dept. of Energy Sci., Tokyo Inst. of Technol., Yokohama, Japan
Volume
41
Issue
1
fYear
2013
fDate
Jan. 2013
Firstpage
119
Lastpage
125
Abstract
Atmospheric-pressure plasma jet sources have proven useful for surface treatments; however, conventional plasma and near-plasma sources have limitations in the number of different plasma gas species that they can handle. We previously developed a damage-free multigas plasma jet source that can generate stable atmospheric-pressure plasma using various gas species without thermal/electrical discharge damage. Herein, we investigate the fundamental characteristics of the generated plasma such as gas temperature (<;57°C) and emission properties. In addition, we evaluate the industrial potential of the jet source by using it with various gas species to induce surface hydrophilization in a polyimide film. The jet source proved useful, and carbon dioxide proved the most effective of the studied gas species for the purpose with the hydrophilized surface maintaining a contact angle of about 30° for over 32 days after plasma irradiation.
Keywords
carbon compounds; plasma jets; plasma materials processing; plasma sources; plasma temperature; polymer films; surface treatment; CO2; atmospheric plasma jet source; carbon dioxide; damage free plasma jet source; multigas plasma jet source; plasma emission properties; plasma gas species; plasma gas temperature; polyimide film surface hydrophilization; surface treatments; Argon; Carbon dioxide; Helium; Nitrogen; Plasma measurements; Plasmas; Surface treatment; Atmospheric-pressure plasma; damage-free plasma; multigas plasma; polyimide (PI); surface treatment;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2012.2227459
Filename
6361490
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