• DocumentCode
    764915
  • Title

    Preoxidation as a General Approach to Suppressing Orange-Peel Coupling in Magnetic Tunnel Junctions

  • Author

    Egelhoff, W.F. ; McMichael, R.D., Jr. ; Dennis, C.L. ; Stiles, M.D. ; Shapiro, A.J. ; Maranville, B.B. ; Powell, C.J.

  • Author_Institution
    Nat. Inst. of Stand. & Technol., Gaithersburg, MD
  • Volume
    42
  • Issue
    10
  • fYear
    2006
  • Firstpage
    2664
  • Lastpage
    2666
  • Abstract
    We have found that preoxidation of the bottom electrode prior to deposition of Al2O3 or MgO is very effective as a general approach to suppressing orange-peel coupling in magnetic tunnel junctions. When orange-peel coupling is suppressed, the hard-axis saturation field of the free layer is greatly reduced
  • Keywords
    aluminium compounds; magnesium compounds; magnetic multilayers; magnetic tunnelling; magnetoresistive devices; oxidation; Al2O3; MgO; bottom electrode preoxidation; hard-axis saturation field reduction; magnetic tunnel junctions; orange-peel coupling suppression; Electrodes; Electrons; Laboratories; Magnetic field measurement; Magnetic materials; Magnetic tunneling; Materials science and technology; NIST; Optical coupling; Spin valves; Magnetic tunnel junctions; orange-peel coupling; preoxidation;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/TMAG.2006.879882
  • Filename
    1704398