DocumentCode
764915
Title
Preoxidation as a General Approach to Suppressing Orange-Peel Coupling in Magnetic Tunnel Junctions
Author
Egelhoff, W.F. ; McMichael, R.D., Jr. ; Dennis, C.L. ; Stiles, M.D. ; Shapiro, A.J. ; Maranville, B.B. ; Powell, C.J.
Author_Institution
Nat. Inst. of Stand. & Technol., Gaithersburg, MD
Volume
42
Issue
10
fYear
2006
Firstpage
2664
Lastpage
2666
Abstract
We have found that preoxidation of the bottom electrode prior to deposition of Al2O3 or MgO is very effective as a general approach to suppressing orange-peel coupling in magnetic tunnel junctions. When orange-peel coupling is suppressed, the hard-axis saturation field of the free layer is greatly reduced
Keywords
aluminium compounds; magnesium compounds; magnetic multilayers; magnetic tunnelling; magnetoresistive devices; oxidation; Al2O3; MgO; bottom electrode preoxidation; hard-axis saturation field reduction; magnetic tunnel junctions; orange-peel coupling suppression; Electrodes; Electrons; Laboratories; Magnetic field measurement; Magnetic materials; Magnetic tunneling; Materials science and technology; NIST; Optical coupling; Spin valves; Magnetic tunnel junctions; orange-peel coupling; preoxidation;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.2006.879882
Filename
1704398
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