Magnetic Properties of Permalloy Films By High-Rate Triode Sputtering

Permalloy film was formed by triode sputtering and vacuum-annealed in a magnetic field (150 Oe), and changes in magnetic properties induced by the annealing were studied. The as-sputtered films had a uniaxial magnetic anisotropy, and except for the crystal orientation, films changed little with different sputtering conditions (voltage, Ar pressure). As a result of magnetic field annealing, the film uniaxial anisotropy was maintained up to 300°C, but above 400°C the HcH increased, the anisotropy was lost and soft magnetic characteristics deteriorated. This was attributed to formation of a regular lattice.