DocumentCode
765061
Title
Propagation of Surface Magnetoelastic Waves in Sputtered Fe-Co-B Films
Author
Uenaka, H. ; Makita, A. ; Miyama, T. ; Fujii, T. ; Inoue, M.
Author_Institution
Toyohashi University of Technology
Volume
1
Issue
4
fYear
1985
fDate
7/1/1985 12:00:00 AM
Firstpage
520
Lastpage
522
Abstract
Propagation of surface magnetoelastic waves (SMEWs) at high frequencies (up to 50 MHz) in Fe-Co-B amorphous film formed by RF sputtering onto glass and silicon wafer substrates are described. Piezoelectric transducers were used for SMEW excitation and detection. Output signals showed that, as expected, of the (P+SV)-L, SH, and (P+SV)-T waves, only the latter changes velocity noticeably with the field. The velocity was found to change by a maximum 2.8 percent when a 60 Oe field was applied; however, magnetic annealing had no great effect on this change. The field had a drastic effect on the SH wave amplitude, attributed to the close coupling of the substrate SAW with the metallic magnetic film.
Keywords
Amorphous magnetic materials; Amorphous materials; Glass; Piezoelectric films; Radio frequency; Semiconductor films; Silicon; Sputtering; Substrates; Surface waves;
fLanguage
English
Journal_Title
Magnetics in Japan, IEEE Translation Journal on
Publisher
ieee
ISSN
0882-4959
Type
jour
DOI
10.1109/TJMJ.1985.4548845
Filename
4548845
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