• DocumentCode
    765552
  • Title

    Preparation of TbFeCo Films by Two Source Magnetron Sputtering

  • Author

    Tanaka, M. ; Ohmi, F. ; Watada, A.

  • Author_Institution
    Technology Division, Ricoh Co., Ltd., Numazu.
  • Volume
    1
  • Issue
    5
  • fYear
    1985
  • Firstpage
    631
  • Lastpage
    632
  • Abstract
    The magnetic and magneto-optical properties of TbFeCo films formed on glass substrates by two-source (FeCo and Tb) magnetron sputtering, while varying the RF input power, Ar gas pressure, and subtrate rotation speed, are reported. By independent variation of the input power for the two sources, many different film compositions were obtained. The film Ms, perpendicular anisotropic energy K¿ and Kerr rotation angle ¿K were all fairly stable for substrate rotation speeds of 20 rpm or above, below this all three values increased as the speed was decreased.
  • Keywords
    Amorphous magnetic materials; Anisotropic magnetoresistance; Argon; Magnetic films; Magnetic materials; Perpendicular magnetic recording; Radio frequency; Saturation magnetization; Sputtering; Substrates;
  • fLanguage
    English
  • Journal_Title
    Magnetics in Japan, IEEE Translation Journal on
  • Publisher
    ieee
  • ISSN
    0882-4959
  • Type

    jour

  • DOI
    10.1109/TJMJ.1985.4548892
  • Filename
    4548892
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=765552