DocumentCode
765720
Title
A Flux Screening Technique for Growth of High-Quality Ferrite Films by Pulsed Laser Deposition
Author
Chen, Yajie ; Lu, Tao ; Zhang, Xiaoyu ; Vittoria, Carmine ; Harris, Vincent G.
Author_Institution
Dept. of Electr. & Comput. Eng., Northeastern Univ., Boston, MA
Volume
42
Issue
10
fYear
2006
Firstpage
2888
Lastpage
2890
Abstract
We present a new technique to improve growth of ferrite films by pulsed laser deposition (PLD). The technique utilizes a metal screen placed between target and substrate, effectively to impede formation of large particulates on the surface of ferrite films by changing the plume shape and plasma density in the PLD chamber. Structural, magnetic, electrical, and microwave properties were measured for the flux screened and conventionally grown films. We demonstrate that the flux screen deposited MnZn-ferrite film has a lower coercivity (39 versus 58 Oe) and ferromagnetic resonance linewidth (350 versus 430 Oe at 9.58 GHz). The improvement in magnetic properties is associated with a reduction in large particulate contamination. This simple approach has the potential to produce high-quality ferrite films for use in electronic and microwave devices
Keywords
ferrites; ferromagnetic resonance; magnetic flux; magnetic thin films; manganese alloys; pulsed laser deposition; 9.58 GHz; MnZn; PLD chamber; electrical properties; ferromagnetic resonance linewidth; flux screen; flux screening technique; high-quality ferrite films; magnetic properties; metal screen; microwave properties; plasma density; pulsed laser deposition; structural properties; Ferrite films; Magnetic films; Magnetic properties; Magnetic resonance; Masers; Optical pulses; Pulsed laser deposition; Shape; Substrates; Surface impedance; Ferrite; ferromagnetic resonance (FMR); pulsed laser deposition (PLD);
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.2006.879899
Filename
1704472
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