DocumentCode
766003
Title
Pulse shaping for optimal energy deposition with a cold cathode electron gun for surface treatment
Author
Dobrusin, Pablo Daniel ; Mingolo, Nélida ; Martínez, Oscar Eduardo
Author_Institution
Dept. de Fisica, Univ. de Buenos Aires., Buenos Aires, Argentina
Volume
31
Issue
4
fYear
2003
Firstpage
771
Lastpage
775
Abstract
A pulse-forming network is added in the discharge circuit of a cold-cathode electron gun that gives rise to an improved shape of the pulse, making it closer to the ideal square pulse needed for optimal energy deposition in material surface treatments. It is shown that the circuit can be very accurately designed by means of simulations using empirical equations for the nonlinear response of the gun. Due to the particular nonlinear behavior of the current-voltage in these guns, and the strong nonlinear self-focusing of the beam, the adequate shaping of the temporal profile of the discharge becomes relevant to the efficiency of the system. The effect of using a new discharge circuit for a glow-discharge pulsed electron gun for materials processing is analyzed, showing an almost two-fold improvement in the efficiency of the system regarding the fraction of the energy not wasted in long pulse tails.
Keywords
cathodes; electron guns; glow discharges; plasma materials processing; pulse shaping; pulse shaping circuits; self-focusing; surface treatment; cold cathode electron gun; current-voltage; discharge circuit; discharge temporal profile shaping; efficiency; empirical equations; glow-discharge pulsed electron gun; ideal square pulse; material surface treatments; materials processing; nonlinear response; nonlinear self-focusing; optimal energy deposition; pulse shaping; pulse tails; pulse-forming network; simulations; surface treatment; Cathodes; Circuit simulation; Electrons; Guns; Nonlinear equations; Pulse circuits; Pulse shaping methods; Shape; Surface discharges; Surface treatment;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2003.815478
Filename
1221866
Link To Document