Ion microbeam diagnostics with scintillators for application of deep lithography with particles

We have developed two techniques for microscopic particle beam imaging and dose measurement, both based on scintillators. One employs a scintillating fiberoptic plate to display the two-dimensional beam transversal profile, the other makes use of a small scintillator optically coupled to a compact photomultiplier. We have proved the possibility of detection from single beam particles up to several nanoampere currents. Both the devices are successfully being exploited for on-line control of low and very low intensity proton beams, down to a beam size of <50 μm in the framework of deep lithography with protons oriented to the production of optical microcomponents.