• DocumentCode
    766439
  • Title

    Stacking Structures of Multilayered Thin Films

  • Author

    Tsukahara, S. ; Yokoyama, Y. ; Kazama, N. ; Fujimori, H. ; Satoh, M.

  • Author_Institution
    Electrotechnical Laboratory, Ibaraki
  • Volume
    1
  • Issue
    7
  • fYear
    1985
  • Firstpage
    827
  • Lastpage
    828
  • Abstract
    Magnetostatic coupling between layers in multilayer films enables more complex domain structures than are possible in single-layer films. Both high-speed sputtering and vacuum deposition were used to form films in which magnetic (Fe, Ni) and nonmagnetic (Si, SiO, C) layers alternate. Due to interdiffusion at layer boundaries, sputtered Fe-Si multilayer films metamorphosed into films of alternating layers of ferromagnetic Fe-rich Fe-Si and nonmagnetic Si-rich Si-Fe, which layers are magnetostatically coupled.
  • Keywords
    Couplings; Iron; Magnetic domains; Magnetic films; Magnetic multilayers; Magnetostatics; Semiconductor films; Sputtering; Stacking; Transistors;
  • fLanguage
    English
  • Journal_Title
    Magnetics in Japan, IEEE Translation Journal on
  • Publisher
    ieee
  • ISSN
    0882-4959
  • Type

    jour

  • DOI
    10.1109/TJMJ.1985.4548978
  • Filename
    4548978