Title :
Stacking Structures of Multilayered Thin Films
Author :
Tsukahara, S. ; Yokoyama, Y. ; Kazama, N. ; Fujimori, H. ; Satoh, M.
Author_Institution :
Electrotechnical Laboratory, Ibaraki
Abstract :
Magnetostatic coupling between layers in multilayer films enables more complex domain structures than are possible in single-layer films. Both high-speed sputtering and vacuum deposition were used to form films in which magnetic (Fe, Ni) and nonmagnetic (Si, SiO, C) layers alternate. Due to interdiffusion at layer boundaries, sputtered Fe-Si multilayer films metamorphosed into films of alternating layers of ferromagnetic Fe-rich Fe-Si and nonmagnetic Si-rich Si-Fe, which layers are magnetostatically coupled.
Keywords :
Couplings; Iron; Magnetic domains; Magnetic films; Magnetic multilayers; Magnetostatics; Semiconductor films; Sputtering; Stacking; Transistors;
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
DOI :
10.1109/TJMJ.1985.4548978