Integration of Thin-Film Galfenol With MEMS Cantilevers for Magnetic Actuation

Author

Basantkumar, R.R. ; Stadler, B.J.H. ; Robbins, William P. ; Summers, E.M.

Author_Institution

Dept. of Electr. & Comput. Eng., Minnesota Univ.

Volume

42

Issue

10

fYear

2006

Firstpage

3102

Lastpage

3104

Abstract

Galfenol (Fe_1-xGa_x, where x ranges from 0.19 to 0.30) thin films have been successfully fabricated onto thin glass cover slides using RF sputtering. The Ga composition in the thin films was controlled by the forward power. The films had a preferred (110) orientation. The magnetic response as a function of applied magnetic field was examined using vibrating sample magnetometry (VSM). The crystallography and composition of these films were measured using X-ray (XRD) and electron diffractions, and energy dispersive spectroscopy (EDS), respectively. A capacitance bridge method was used to measure saturation magnetostrictions of up to 147 ppm. Finally, the thin films of Galfenol were integrated with MEMS cantilevers for magnetic actuation

Keywords

X-ray diffraction; cantilevers; electromagnetic actuators; electron diffraction; gallium alloys; iron alloys; magnetic fields; magnetic thin films; magnetometers; magnetostriction; microactuators; sputtering; EDS; FeGa; MEMS cantilevers; RF sputtering; VSM; X-ray diffraction; XRD; capacitance bridge method; crystallography; electron diffractions; energy dispersive spectroscopy; magnetic actuation; magnetic field; magnetic response; saturation magnetostrictions; thin-film galfenol; vibrating sample magnetometry; Crystallography; Glass; Iron; Magnetic field measurement; Magnetic films; Magnetostriction; Micromechanical devices; Radio frequency; Saturation magnetization; Sputtering; Galfenol; MEMS; magnetostriction;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2006.879666

Filename

1704540