DocumentCode
766503
Title
Microfluidic electrodischarge devices with integrated dispersion optics for spectral analysis of water impurities
Author
Que, Long ; Wilson, Chester G. ; Gianchandani, Yogesh B.
Author_Institution
Electr. Eng. & Comput. Sci. Dept., Univ. of Michigan, Ann Arbor, MI, USA
Volume
14
Issue
2
fYear
2005
fDate
4/1/2005 12:00:00 AM
Firstpage
185
Lastpage
191
Abstract
This paper reports a microfluidic device that integrates electrical and optical features required for field-portable water-chemistry testing by discharge spectroscopy. The device utilizes a dc-powered spark between a metal anode and a liquid cathode as the spectral source. Impurities are sputtered from the water sample into the microdischarge and characteristic atomic transitions due to them are detected optically. A blazed grating is used as the dispersion element. The device is fabricated from stacked glass layers, and is assembled and used with a charge-coupled device (CCD) sensing element to distinguish atomic spectra. Two structural variations and optical arrangements are reported. Detection of Cr and other chemicals in water samples has been successfully demonstrated with both devices. The angular resolution in terms of angular change per unit variation in wavelength (∂θ/∂λ) is experimentally determined to be approximately 0.10 rad/μm, as opposed to the idealized theoretical estimate of 0.22 rad/μm. This is because the microdischarge is uncollimated and not a point source. However, this is sufficient angular resolution to allow critical spectra of metal impurities to be distinguished.
Keywords
charge-coupled devices; chemical analysis; chemical sensors; diffraction gratings; impurities; microfluidics; optical dispersion; spectra; water; Cr; H2O; angular resolution; atomic spectra; blazed grating; characteristic atomic transitions; charge-coupled device sensing element; chemical sensing; dc-powered spark; discharge spectroscopy; dispersion element; field-portable water-chemistry testing; integrated dispersion optics; liquid cathode; metal anode; metal impurities; microdischarge; microfluidic electrodischarge devices; optical arrangements; sample delivery; spectral analysis; spectral source; stacked glass layers; structural variations; water chemistry; water impurities; Atom optics; Atomic layer deposition; Chemical elements; Impurities; Integrated optics; Microfluidics; Optical devices; Optical sensors; Spectral analysis; Testing; Chemical sensing; dispersion optics; microdischarge; sample delivery; water chemistry;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2004.839337
Filename
1416894
Link To Document