Hybrid-mounted micromachined aluminum hotwires for wall shear-stress measurements

Author

Haasl, Sjoerd ; Mucha, Dirk ; Chernoray, Valery ; Ebefors, Thorbjörn ; Enoksson, Peter ; Löfdahl, Lennart ; Stemme, Göran

Author_Institution

Microsystem Technol. Group, R. Inst. of Technol., Stockholm, Sweden

Volume

14

Issue

2

fYear

2005

fDate

4/1/2005 12:00:00 AM

Firstpage

254

Lastpage

260

Abstract

In this paper, we present a micromachined metal hotwire anemometer sensor for use in wall shear-stress measurements. We describe its design and fabrication. A novel hybrid assembly method has been developed to make it possible to measure close to the surface without contacting leads interfering with the flow. Experimental results illustrate the behavior and characteristics of this sensor.

Keywords

anemometers; boundary layers; flow measurement; microassembling; micromachining; microsensors; stress measurement; Al; anemometer sensor; hybrid assembly method; hybrid mounting; microassembly; micromachined aluminum hotwires; micromachined metal hotwire; microsensors; wall shear stress measurement flow; Aluminum; Assembly; Electric variables measurement; Fluid flow measurement; Interference; Sensor phenomena and characterization; Sensor systems; Stress; Thermal sensors; Velocity measurement; Aluminum; anemometers; assembly; hotwire; microassembly; microsensors; wall shear stress;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2004.839029

Filename

1416902