DocumentCode
766767
Title
Microstructure and Corrosion Resistance of CoCr Thin Film
Author
Abe, S. ; Takaki, S. ; Maekawa, Keiichi ; Takahashi, T.
Author_Institution
Sumitomo 3M.
Volume
1
Issue
7
fYear
1985
Firstpage
900
Lastpage
901
Abstract
The microstructure of CoCr films varies with the fabrication conditions. The surface structure deteriorates faster when Cr density is low. When the grain structure is very fine, the deterioration is faster when the grain interfaces are very clearly-defined. No significant difference was found in Ms decrease when an SiO2 protective film was deposited on the CrCo. The thickness was varied to 100 Ã
, 300 Ã
or 500 Ã
. A protective film thickness of at most 100 Ã
proved to be effective in producing good corrosion resistance.
Keywords
Chromium; Corrosion; Life estimation; Life testing; Magnetic films; Microstructure; Protection; Sputtering; Surface structures; Transistors;
fLanguage
English
Journal_Title
Magnetics in Japan, IEEE Translation Journal on
Publisher
ieee
ISSN
0882-4959
Type
jour
DOI
10.1109/TJMJ.1985.4549008
Filename
4549008
Link To Document