Title :
Microstructure and Corrosion Resistance of CoCr Thin Film
Author :
Abe, S. ; Takaki, S. ; Maekawa, Keiichi ; Takahashi, T.
Author_Institution :
Sumitomo 3M.
Abstract :
The microstructure of CoCr films varies with the fabrication conditions. The surface structure deteriorates faster when Cr density is low. When the grain structure is very fine, the deterioration is faster when the grain interfaces are very clearly-defined. No significant difference was found in Ms decrease when an SiO2 protective film was deposited on the CrCo. The thickness was varied to 100 Ã
, 300 Ã
or 500 Ã
. A protective film thickness of at most 100 Ã
proved to be effective in producing good corrosion resistance.
Keywords :
Chromium; Corrosion; Life estimation; Life testing; Magnetic films; Microstructure; Protection; Sputtering; Surface structures; Transistors;
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
DOI :
10.1109/TJMJ.1985.4549008