Magnetic Characteristics of CoCr Thin Films on Metallic Under Layer

A dc magnetron sputtering device was used to fabricate under layer films of NiFe, Ti, Mo, Ta, and CoZrNb with thicknesses of 0.03-0.3, ¿m and then CoCr films on top with a thickness of 0.2, ¿m under fixed conditions. Comparing VSM and Kerr effect analysis results for these films with similar analyses of CoCr films on PET films, the Hc¿ value was large but the perpendicular anisotropy was small. This is due to the fact that in the columnar structure small grains grow with non-uniform directions disturbing the structure.