• DocumentCode
    767045
  • Title

    Integrated thin-film micropotentiometers

  • Author

    Kinard, J.R. ; Huang, D.X. ; Novotny, D.B.

  • Author_Institution
    Div. of Electr., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
  • Volume
    44
  • Issue
    2
  • fYear
    1995
  • fDate
    4/1/1995 12:00:00 AM
  • Firstpage
    374
  • Lastpage
    376
  • Abstract
    Integrated micropotentiometers, new devices fabricated with thin-film technology and the micromachining of silicon, have been developed for the accurate determination of ac voltage from 1 to 200 mV at frequencies from audio to 1 MHz and with the potential for higher frequencies
  • Keywords
    measurement standards; potentiometers; thin film devices; thin film resistors; voltage measurement; 1 MHz; 1 to 200 mV; Si; ac voltage; integrated thin-film micropotentiometers; micromachining; thin-film technology; Dielectric losses; Frequency; Micromachining; NIST; Nonhomogeneous media; Resistors; Semiconductor thin films; Silicon; Transistors; Voltage;
  • fLanguage
    English
  • Journal_Title
    Instrumentation and Measurement, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9456
  • Type

    jour

  • DOI
    10.1109/19.377856
  • Filename
    377856
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=767045