DocumentCode :
767060
Title :
Microorganisms for MEMS
Author :
Xiong, Xiaorong ; Lidstrom, Mary E. ; Parviz, Babak A.
Author_Institution :
Intel Corp., Chandler, AZ
Volume :
16
Issue :
2
fYear :
2007
fDate :
4/1/2007 12:00:00 AM
Firstpage :
429
Lastpage :
444
Abstract :
Uni- and multicellular microorganisms are capable of performing a variety of functions. Many of these self-replicating biological entities can synthesize and structure materials, sense, convert energy, communicate, and generate mechanical motion. From an engineering vantage point, these microorganisms may be considered as functional systems that can further the state-of-the-art in microelectromechanical system microfabrication technology and device function. Microorganisms can synthesize a wide range of inorganics at room temperature in aqueous environment, can form nanoscale objects with resolutions beyond the capabilities of conventional photolithography, and can be used to construct highly target-specific chemical and biological sensors among other applications. In this paper we consider the unique opportunities offered by microorganisms-when used to complement a microfabrication process or used as an integral part of a microelectromechanical system-in inorganic material synthesis, in formation of structures, and in transduction. We catalog many of the microorganisms that can be potentially used in this fashion and under each category discuss the specifics of a few model microorganisms. Our goal is to discuss the pros and cons of integration of microorganisms and microelectromechanical system technology and provide a reference point for researchers in this promising area
Keywords :
bioMEMS; microactuators; microorganisms; microsensors; biotic-MEMS; functional structure; integrated system; material synthesis; multicellular microorganisms; sensors and actuators; unicellular microorganisms; Biological materials; Chemical technology; Lithography; Microelectromechanical systems; Micromechanical devices; Microorganisms; Nanobioscience; Power engineering and energy; Temperature distribution; Temperature sensors; Biotic-MEMS; functional structure; integrated system; material synthesis; sensors and actuators; uni- and multicellular microorganisms;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2006.885851
Filename :
4147607
Link To Document :
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