Title :
Magnetic and Thermal Properties of MoN Underlayer for Spin Valves Depending on Nitrogen Concentration
Author :
Kim, J. ; Choi, Y. ; Jo, S. ; Kim, S.Y. ; Lee, C.W.
Author_Institution :
Sch. of Electonic Eng., Soongsil Univ.
Abstract :
We incorporated nitrogen in the Mo underlayer and investigated the effect of nitrogen concentration on the magnetic properties and annealing behavior of the spin valve devices. The spin valve structure was Si/SiO2/Mo(MoN)(35Aring)/NiFe(21 Aring)/CoFe(28 Aring)/Cu(22 Aring)/CoFe(18 Aring)/IrMn(65 Aring)/Ta(25Aring). It is concluded that MoN underlayer is magnetically as good as Ta underlayer for N2 gas flow rate of less than 6 sccm
Keywords :
cobalt alloys; iron alloys; magnetic annealing; magnetic multilayers; manganese alloys; molybdenum compounds; nickel alloys; silicon compounds; spin valves; tantalum alloys; thermal properties; MoN; N2; Si-SiO2-Mo(MoN)-NiFe-CoFe-Cu-CoFe-IrMn-Ta; annealing behavior; diffusion barrier; magnetic property; nitrogen concentration; spin valves; thermal property; Annealing; Conductivity; Fluid flow; Giant magnetoresistance; Magnetic field measurement; Magnetic films; Magnetic properties; Nitrogen; Spin valves; Substrates; Diffusion barrier; GMR; IrMn; MoN films; spin valve; underlayer;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2006.879148
