Noise reduction in an optical interferometer for picometer measurements

Author

Fujimoto, Hiroyuki ; Tanaka, Mitsuru ; Nakayama, Kan

Author_Institution

Nat. Res. Lab. of Metrol., Ibaraki, Japan

Volume

44

Issue

2

fYear

1995

fDate

4/1/1995 12:00:00 AM

Firstpage

471

Lastpage

474

Abstract

Picometer interferometry of moving objects is demonstrated experimentally over the frequency range 0 to 160 Hz. Active feedback is adopted to reduce the lowest frequency noise component due to coupling between geometrical fluctuations of the laser beam incident on the interferometer optics and imperfections in its optical elements. Passive measures to reduce the noise due to thermally induced changes of optical elements both in the geometrical arrangement and in the optical properties are introduced by decreasing the sensitivity to temperature change. With these methods the resultant noise is reduced to 3 pm

Keywords

Michelson interferometers; light interferometers; light interferometry; measurement by laser beam; nanotechnology; position measurement; random noise; 0 to 160 Hz; Avogadro constant; active feedback; coupling; geometrical arrangement; geometrical fluctuations; interferometry; laser interferometry; noise; noise reduction; optical elements; optical interferometer; optical properties; passive measures; picometer measurements; thermally induced changes; Active noise reduction; Frequency; Geometrical optics; Laser feedback; Noise reduction; Optical devices; Optical feedback; Optical interferometry; Optical noise; Optical sensors;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.377883

Filename

377883