A novel, single-mode piezoceramic plate actuator for ultrasonic linear motors

Author

Vyshnevsky, O. ; Kovalev, Sergej ; Wischnewskiy, Wladimir

Author_Institution

Physik Instrumente GmbH & Co. KG, Karlsruhe, Germany

Volume

52

Issue

11

fYear

2005

Firstpage

2047

Lastpage

2053

Abstract

A new type of piezoelectric plate actuator for ultrasonic linear motors has been developed. These new piezoelectric actuators use the principle of asymmetric resonant excitation of the piezoceramic plate in a special resonant mode consisting of a standing two-dimensional extensional wave in a piezoceramic plate. The behavior of the actuator has been simulated with finite-element method (FEM) software and the simulation results checked with single-point contact measurements on the surface of the actuator. This paper describes this work and closes by describing the new ultrasonic translation stages based on this design.

Keywords

finite element analysis; linear motors; piezoceramics; piezoelectric actuators; ultrasonic motors; FEM software; asymmetric resonant excitation; finite-element method software; single-mode piezoceramic plate actuator; single-point contact measurements; two-dimensional extensional wave; ultrasonic linear motors; Finite element methods; Hydraulic actuators; Instruments; Piezoelectric actuators; Piezoelectric materials; Resonance; Rotors; Software measurement; Stators; Ultrasonic variables measurement; Ceramics; Computer Simulation; Computer-Aided Design; Electrochemistry; Equipment Design; Equipment Failure Analysis; Models, Theoretical; Motion; Reproducibility of Results; Sensitivity and Specificity; Transducers; Ultrasonography;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2005.1561674

Filename

1561674