Title :
X-ray topography analysis of acoustic wave fields in the SAW-resonator structures
Author :
Roshchupkin, Dmitry V. ; Roshchupkina, Helen D. ; Irzhak, Dmitry V.
Author_Institution :
Inst. of Microelectron. Technol. & High Purity Mater., Russian Acad. of Sci., Chernogolovka, Russia
Abstract :
The formation of fields of standing surface acoustic waves (SAW) in LiNbO/sub 3/ and La/sub 3/Ga/sub 5/SiO/sub 14/ (LGS) crystals was studied by high-resolution topography method on a laboratory X-ray source. The fields of standing SAW were formed using SAW-resonator structures consisting of interdigital transducer (IDT) and reflecting gratings. The SAW amplitudes and power flow angles were measured by X-ray topography, diffraction in acoustic beam was visualized, and the SAW interaction with the crystal structure defects was studied.
Keywords :
F-centres; X-ray diffraction; X-ray topography; acoustic wave effects; gallium compounds; lanthanum compounds; lithium compounds; surface acoustic waves; twinning; F-centers; La/sub 3/Ga/sub 5/SiO/sub 14/; LiNbO/sub 3/; SAW-resonator structures; X-ray diffraction; X-ray topography analysis; acoustic beam; acoustic wave fields; crystal structure defects; interdigital transducer; reflecting gratings; twins; Acoustic measurements; Acoustic transducers; Acoustic waves; Crystals; Gratings; Laboratories; Load flow; Power measurement; Surface acoustic waves; Surface topography;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2005.1561678
