X-ray topography analysis of acoustic wave fields in the SAW-resonator structures

Author

Roshchupkin, Dmitry V. ; Roshchupkina, Helen D. ; Irzhak, Dmitry V.

Author_Institution

Inst. of Microelectron. Technol. & High Purity Mater., Russian Acad. of Sci., Chernogolovka, Russia

Volume

52

Issue

11

fYear

2005

Firstpage

2081

Lastpage

2087

Abstract

The formation of fields of standing surface acoustic waves (SAW) in LiNbO/sub 3/ and La/sub 3/Ga/sub 5/SiO/sub 14/ (LGS) crystals was studied by high-resolution topography method on a laboratory X-ray source. The fields of standing SAW were formed using SAW-resonator structures consisting of interdigital transducer (IDT) and reflecting gratings. The SAW amplitudes and power flow angles were measured by X-ray topography, diffraction in acoustic beam was visualized, and the SAW interaction with the crystal structure defects was studied.

Keywords

F-centres; X-ray diffraction; X-ray topography; acoustic wave effects; gallium compounds; lanthanum compounds; lithium compounds; surface acoustic waves; twinning; F-centers; La/sub 3/Ga/sub 5/SiO/sub 14/; LiNbO/sub 3/; SAW-resonator structures; X-ray diffraction; X-ray topography analysis; acoustic beam; acoustic wave fields; crystal structure defects; interdigital transducer; reflecting gratings; twins; Acoustic measurements; Acoustic transducers; Acoustic waves; Crystals; Gratings; Laboratories; Load flow; Power measurement; Surface acoustic waves; Surface topography;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2005.1561678

Filename

1561678