Title :
A Novel Approach to Modeling Metal–Insulator–Metal Capacitors Over Vias With Significant Electrical Length
Author :
Asahara, Masa ; Campbell, Charles F. ; Frensley, William R.
Author_Institution :
Satellink Inc, Garland, TX
fDate :
4/1/2007 12:00:00 AM
Abstract :
In monolithic-microwave integrated-circuit design, a metal-insulator-metal (MIM) capacitor is one of the key passive components. Some commonly used MIM capacitor models are optimized for series capacitor applications. These conventional models, however, face a challenge as a need for a shunt capacitor application arises. This paper is a solution provider, ushering in a new approach to modeling a shunt capacitor of large electrical length over grounding substrate vias. Our model is derived from a set of design equations that allows asymmetric coupled lines in an inhomogeneous medium to be approximated to symmetric coupled lines in a homogeneous medium. Here we gain a theoretical insight into the rationale behind this approximation. The new approach benefits from: 1) a four-port implementation providing two connections to top and bottom plates and 2) a drastic reduction in mathematical complexity without trading off accuracy or compatibility. Circuit and electromagnetic simulations has proven to be in good agreement with measurements of a test structure of electrical length 558deg at 50 GHz
Keywords :
MIM devices; MMIC; capacitors; millimetre wave devices; 50 GHz; MIM capacitor; four-port implementation; grounding substrate vias; metal-insulator-metal capacitors; monolithic-microwave integrated-circuit design; passive components; shunt capacitor; Circuit simulation; Circuit testing; Coupling circuits; Electric variables measurement; Equations; Grounding; Length measurement; MIM capacitors; Metal-insulator structures; Shunt (electrical); Metal–insulator–metal (MIM) capacitor;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.2007.892810