DocumentCode :
769147
Title :
Thickness Dependence of Effective Composition for Amorphous TbFe Films
Author :
Nakada, Af ; Toki, K. ; Okada, Af
Author_Institution :
Microelectronics Res. Labs., NEC Corporation.
Volume :
2
Issue :
4
fYear :
1987
fDate :
4/1/1987 12:00:00 AM
Firstpage :
348
Lastpage :
349
Abstract :
An attempt is made to explain the deviation to the Fe-rich side of the ``effective´´ composition of RF sputtered, amorphous TbFe films. The results indicate that the effective composition apparently varies as a function of film thickness, and this cannot be explained using the present model. A thin boundary-layer model is proposed which assumes: 1) these layers are formed at both the film-substrate and film-air boundaries; 2) this layer thickness is independent of the total film thickness; and 3) there are exchange couplings between the boundary layer and the middle layer.
Keywords :
Amorphous materials; Etching; Glass; Helium; Magnetic films; Magnetooptic effects; Plastics; Radio frequency; Sputtering; Substrates;
fLanguage :
English
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
Publisher :
ieee
ISSN :
0882-4959
Type :
jour
DOI :
10.1109/TJMJ.1987.4549437
Filename :
4549437
Link To Document :
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