Title :
Corrosion Resistance Dependence on Ta and Zr Densities in Co-Ta and Co-Zr Alloy Films
Author_Institution :
Microelectronics Res. Labs. NEC Corporation.
Abstract :
Corrosion characteristics of CoZr and CoTa, related to Zr and Ta composition densities, were studied. Corrosion characteristics were analyzed by measuring electrical resistance increase (¿R/Ro) under 80°C and 85%RH atmosphere. It was confirmed that corrosion rates depended on Zr and Ta densities. Corroded layer thickness X was expressed by the equation X = ßlog(t + 1). It was found these films have excellent corrosion resistance.
Keywords :
Atmosphere; Atmospheric measurements; Chemicals; Corrosion; Electric resistance; Electric variables measurement; Electrical resistance measurement; Magnetic films; Stability; Zirconium;
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
DOI :
10.1109/TJMJ.1987.4549586
