Title :
Structure and Magnetic Properties of FeCr Sputtered Films
Author :
Oda, S. ; Ohkoshi, M. ; Kusuda, T.
Author_Institution :
Hiroshima Univ.
Abstract :
The structure and magnetic properties of FeCr sputtered films were studied, and the conditions for perpendicular magnetic anisotropy investigated. Results indicated that films sputtered at an input power of 200 W were bcc, but at lower input powers a ¿ phase appeared, and films had a perpendicular anisotropy, possibly due to an observed columnar microstructure. When a focusing magnetic field was applied during sputtering, there was less bcc phase material and more of the ¿ phase.
Keywords :
Anisotropic magnetoresistance; Chromium; Magnetic fields; Magnetic films; Magnetic properties; Magnetization; Microstructure; Plasma temperature; Substrates; X-ray diffraction;
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
DOI :
10.1109/TJMJ.1987.4549666
