Title :
Evaluation of Perpendicular Magnetic Recording Co-Cr Films by CMF Magnetron Sputtering
Author :
Sinohara, S. ; Fukuda, J. ; Takahashi, T. ; Yoshida, J. ; Hata, T.
Author_Institution :
Toyama Univ.
Abstract :
Co-Cr films were prepared by CMF magnetron sputtering, and the effects of the background pressure Pbg on the film structure and magnetic properties were investigated. When Pbg was sufficiently low, films had a perpendicular magnetic anisotropy and satisfactory characteristics; but the perpendicular orientation deteriorated rapidly as Pbg was increased above 0.1 mPa, and the coercivity and anisotropy field likewise decreased. These results agree in part with previous results for films formed by rf diode sputtering.
Keywords :
Argon; Crystallography; Glass; Magnetic anisotropy; Magnetic films; Magnetic properties; Perpendicular magnetic anisotropy; Perpendicular magnetic recording; Sputtering; X-ray diffraction;
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
DOI :
10.1109/TJMJ.1987.4549670
