DocumentCode
771528
Title
Evaluation of Perpendicular Magnetic Recording Co-Cr Films by CMF Magnetron Sputtering
Author
Sinohara, S. ; Fukuda, J. ; Takahashi, T. ; Yoshida, J. ; Hata, T.
Author_Institution
Toyama Univ.
Volume
2
Issue
11
fYear
1987
Firstpage
1014
Lastpage
1016
Abstract
Co-Cr films were prepared by CMF magnetron sputtering, and the effects of the background pressure Pbg on the film structure and magnetic properties were investigated. When Pbg was sufficiently low, films had a perpendicular magnetic anisotropy and satisfactory characteristics; but the perpendicular orientation deteriorated rapidly as Pbg was increased above 0.1 mPa, and the coercivity and anisotropy field likewise decreased. These results agree in part with previous results for films formed by rf diode sputtering.
Keywords
Argon; Crystallography; Glass; Magnetic anisotropy; Magnetic films; Magnetic properties; Perpendicular magnetic anisotropy; Perpendicular magnetic recording; Sputtering; X-ray diffraction;
fLanguage
English
Journal_Title
Magnetics in Japan, IEEE Translation Journal on
Publisher
ieee
ISSN
0882-4959
Type
jour
DOI
10.1109/TJMJ.1987.4549670
Filename
4549670
Link To Document