• DocumentCode
    772296
  • Title

    Low loss multimode waveguides on silicon substrate

  • Author

    Boulas, C. ; Valette, S. ; Parrens, E. ; Fournier, A.

  • Author_Institution
    LETI, CEA, DTA, Grenoble, France
  • Volume
    28
  • Issue
    17
  • fYear
    1992
  • Firstpage
    1648
  • Lastpage
    1649
  • Abstract
    A new method for achieving low loss multimode waveguides combining microwave etching and thermal oxidation of silicon to form a suitable mould and optical cladding is presented. The mould is then filled up with an optical glue to make the waveguide core. Optical losses as low as 0.1+or-0.08 dB/cm have been measured with the guiding structure compatible with multimode silica or plastic fibres.
  • Keywords
    etching; integrated optics; optical losses; optical waveguides; optical workshop techniques; oxidation; Si substrate; low loss multimode waveguides; microwave etching; mould; optical cladding; optical glue; thermal oxidation; waveguide core;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19921049
  • Filename
    156307
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=772296