Title :
Low loss multimode waveguides on silicon substrate
Author :
Boulas, C. ; Valette, S. ; Parrens, E. ; Fournier, A.
Author_Institution :
LETI, CEA, DTA, Grenoble, France
Abstract :
A new method for achieving low loss multimode waveguides combining microwave etching and thermal oxidation of silicon to form a suitable mould and optical cladding is presented. The mould is then filled up with an optical glue to make the waveguide core. Optical losses as low as 0.1+or-0.08 dB/cm have been measured with the guiding structure compatible with multimode silica or plastic fibres.
Keywords :
etching; integrated optics; optical losses; optical waveguides; optical workshop techniques; oxidation; Si substrate; low loss multimode waveguides; microwave etching; mould; optical cladding; optical glue; thermal oxidation; waveguide core;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19921049
