Title :
Introduction to the special issue on micromachined ultrasonic transducers
Author :
Khuri-Yakub, B.T.
Abstract :
This special issue attempts to offer a number of articles that span a comprehensive list of topics of interest in the development of the micromachined transducer. A lot of good development in modeling and implementation has taken place in 10 years, but more, much more needs to be done to bring about a complete understanding of these devices. It is hoped that this issue will help encourage more research and development in this field to help realize the full potential of the micromachined ultrasonic transducers.
Keywords :
Biomembranes; Capacitors; Integrated circuit manufacture; Magnetic materials; Micromachining; Piezoelectric transducers; Silicon; Special issues and sections; Ultrasonic imaging; Ultrasonic transducers;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2005.1563259