DocumentCode
772826
Title
A direct method for the extraction of diffusion length and surface recombination velocity from an EBIC line scan: planar junction configuration
Author
Chan, Daniel S H ; Ong, Vincent K.S. ; Phang, Jacob C H
Author_Institution
Fac. of Eng., Nat. Univ. of Singapore, Singapore
Volume
42
Issue
5
fYear
1995
fDate
5/1/1995 12:00:00 AM
Firstpage
963
Lastpage
968
Abstract
A direct method of extracting bulk minority carrier diffusion length and surface recombination velocity from an EBIC line scan in the planar configuration is described. The accuracy of the method is verified by 3-D computer simulation and compared with existing methods. It mas found that this method is much simpler to use and gives better accuracy than existing methods
Keywords
EBIC; carrier lifetime; electron-hole recombination; minority carriers; p-n junctions; surface recombination; 3D computer simulation; EBIC line scan; diffusion length; minority carrier; p-n junctions; planar junction configuration; surface recombination velocity; Computer simulation; Failure analysis; Gaussian distribution; Helium; Integrated circuit reliability; Jacobian matrices; Linear regression; P-n junctions; Reliability engineering; Schottky diodes;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.381995
Filename
381995
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