Title :
A quasi-continuous-wave deep ultraviolet laser source
Author :
Wall, Kevin F. ; Smucz, Joseph S. ; Pati, Bhabana ; Isyanova, Yelena ; Moulton, Peter F. ; Manni, Jeffrey G.
Author_Institution :
Q-Peak Inc., Bedford, MA, USA
Abstract :
We have developed a quasi-CW, deep ultraviolet source producing >250 mW of 205-nm radiation. The source consists of a 100-MHz, mode-locked, 15-W, 1047-nm master-oscillator/power-amplifier, a synchronously pumped optical parametric oscillator, and three nonlinear conversion stages.
Keywords :
laser mode locking; neodymium; optical harmonic generation; optical parametric oscillators; optical pumping; solid lasers; ultraviolet lithography; ultraviolet sources; 1047 nm; 15 W; 250 mW; DUV photolithography; Nd:YLF laser; SHG; master-oscillator/power-amplifier; nonlinear conversion stages; quasi-CW deep ultraviolet source; quasi-continuous-wave deep ultraviolet laser source; synchronously pumped optical parametric oscillator; Frequency; Nonlinear optics; Optical harmonic generation; Optical mixing; Optical pulse generation; Optical pumping; Oscillators; Power lasers; Solid lasers; Tunable circuits and devices;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.2003.816088
