Universal system for photoelectric characterisation of semiconductor structures

A multifunctional system for the photoelectric measurement of semiconductor structures (MSPM) is presented. The system enables very accurate photocurrent measurements to be taken at levels as low as 10 fA. Measured structures can be biased by sequences of DC voltages and stimulated by light beams of predefined wavelengths and powers. The software controls all the system actions allowing flexibility in retrieving data stored in the related databases.