DocumentCode :
774187
Title :
Active damping based on decoupled collocated control
Author :
Holterman, Jan ; De Vries, Theo J A
Author_Institution :
Control Lab., Univ. of Twente, Enschede, Netherlands
Volume :
10
Issue :
2
fYear :
2005
fDate :
4/1/2005 12:00:00 AM
Firstpage :
135
Lastpage :
145
Abstract :
Robust stability of controlled mechanical systems is often obtained using collocated actuator-sensor-pairs. Collocation enables the implementation of a passive control law, which is robustly stable, irrespective of structural modeling errors. Within the context of vibration control, this knowledge is used to obtain robust active damping. However, collocated control is inherently in terms of "local" coordinates, whereas vibration analysis is usually in terms of "modal" coordinates. Therefore, modal decoupling of the collocated control loops is required. It is shown that, under mild conditions, transformation of the control problem from local into modal coordinates yields control loops that again enable the implementation of passive and thus robustly stable control laws. The presented theory is illustrated by means of experiments on the six-degrees-of-freedom (DOF) actively controlled lens suspension within a micro-lithography machine.
Keywords :
MIMO systems; damping; robust control; vibration control; MIMO control system; active damping; collocated actuator-sensor-pairs; collocated control loops; controlled mechanical system; decoupled collocated control; micro-lithography machine; modal coordinates; passive control law; robust control; vibration control; Actuators; Control systems; Damping; Force control; Mechanical variables control; Open loop systems; Robust control; Signal processing; Stability; Vibration control; Active damping; decoupled control; integral force feedback; micro-lithography; modal control; multiple-input–multiple-output (MIMO) collocated control; vibration control;
fLanguage :
English
Journal_Title :
Mechatronics, IEEE/ASME Transactions on
Publisher :
ieee
ISSN :
1083-4435
Type :
jour
DOI :
10.1109/TMECH.2005.844702
Filename :
1420321
Link To Document :
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