• DocumentCode
    774187
  • Title

    Active damping based on decoupled collocated control

  • Author

    Holterman, Jan ; De Vries, Theo J A

  • Author_Institution
    Control Lab., Univ. of Twente, Enschede, Netherlands
  • Volume
    10
  • Issue
    2
  • fYear
    2005
  • fDate
    4/1/2005 12:00:00 AM
  • Firstpage
    135
  • Lastpage
    145
  • Abstract
    Robust stability of controlled mechanical systems is often obtained using collocated actuator-sensor-pairs. Collocation enables the implementation of a passive control law, which is robustly stable, irrespective of structural modeling errors. Within the context of vibration control, this knowledge is used to obtain robust active damping. However, collocated control is inherently in terms of "local" coordinates, whereas vibration analysis is usually in terms of "modal" coordinates. Therefore, modal decoupling of the collocated control loops is required. It is shown that, under mild conditions, transformation of the control problem from local into modal coordinates yields control loops that again enable the implementation of passive and thus robustly stable control laws. The presented theory is illustrated by means of experiments on the six-degrees-of-freedom (DOF) actively controlled lens suspension within a micro-lithography machine.
  • Keywords
    MIMO systems; damping; robust control; vibration control; MIMO control system; active damping; collocated actuator-sensor-pairs; collocated control loops; controlled mechanical system; decoupled collocated control; micro-lithography machine; modal coordinates; passive control law; robust control; vibration control; Actuators; Control systems; Damping; Force control; Mechanical variables control; Open loop systems; Robust control; Signal processing; Stability; Vibration control; Active damping; decoupled control; integral force feedback; micro-lithography; modal control; multiple-input–multiple-output (MIMO) collocated control; vibration control;
  • fLanguage
    English
  • Journal_Title
    Mechatronics, IEEE/ASME Transactions on
  • Publisher
    ieee
  • ISSN
    1083-4435
  • Type

    jour

  • DOI
    10.1109/TMECH.2005.844702
  • Filename
    1420321