DocumentCode
774187
Title
Active damping based on decoupled collocated control
Author
Holterman, Jan ; De Vries, Theo J A
Author_Institution
Control Lab., Univ. of Twente, Enschede, Netherlands
Volume
10
Issue
2
fYear
2005
fDate
4/1/2005 12:00:00 AM
Firstpage
135
Lastpage
145
Abstract
Robust stability of controlled mechanical systems is often obtained using collocated actuator-sensor-pairs. Collocation enables the implementation of a passive control law, which is robustly stable, irrespective of structural modeling errors. Within the context of vibration control, this knowledge is used to obtain robust active damping. However, collocated control is inherently in terms of "local" coordinates, whereas vibration analysis is usually in terms of "modal" coordinates. Therefore, modal decoupling of the collocated control loops is required. It is shown that, under mild conditions, transformation of the control problem from local into modal coordinates yields control loops that again enable the implementation of passive and thus robustly stable control laws. The presented theory is illustrated by means of experiments on the six-degrees-of-freedom (DOF) actively controlled lens suspension within a micro-lithography machine.
Keywords
MIMO systems; damping; robust control; vibration control; MIMO control system; active damping; collocated actuator-sensor-pairs; collocated control loops; controlled mechanical system; decoupled collocated control; micro-lithography machine; modal coordinates; passive control law; robust control; vibration control; Actuators; Control systems; Damping; Force control; Mechanical variables control; Open loop systems; Robust control; Signal processing; Stability; Vibration control; Active damping; decoupled control; integral force feedback; micro-lithography; modal control; multiple-input–multiple-output (MIMO) collocated control; vibration control;
fLanguage
English
Journal_Title
Mechatronics, IEEE/ASME Transactions on
Publisher
ieee
ISSN
1083-4435
Type
jour
DOI
10.1109/TMECH.2005.844702
Filename
1420321
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