DocumentCode :
774231
Title :
3-inch single-crystal LiTaO3films onto metallic electrode using Smart CutTMtechnology
Author :
Tauzin, A. ; Dechamp, J. ; Madeira, F. ; Mazen, F. ; Zussy, M. ; Deguet, C. ; Clavelier, L. ; Moulet, J.-S. ; Richtarch, C. ; Akatsu, T. ; Yoshimi, M. ; Rigny, A.
Author_Institution :
CEA-DRT-LETL, CEA/GRE, Grenoble
Volume :
44
Issue :
13
fYear :
2008
Firstpage :
822
Lastpage :
824
Abstract :
The Smart CutTM technology has been used for LiTaO3 layer transfer. A 3-inch full wafer single-crystal LiTaO3 layer onto a carrier wafer comprising a metallic electrode is reported.
Keywords :
electrodes; ferroelectric thin films; lanthanum compounds; 3-inch full wafer crystals; LiTaO3-Cr-SiO2-LiTaO3; Smart CutTM technology; ferroelectric material; ferroelectric properties; metallic electrode; thin films;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el:20081057
Filename :
4550710
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=774231
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