A Poly-Si-Based Vertical Comb-Drive Two-Axis Gimbaled Scanner for Optical Applications

Author

Wu, Mingching ; Lin, Hung-Yi ; Fang, Weileun

Author_Institution

Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu

Volume

18

Issue

20

fYear

2006

Firstpage

2111

Lastpage

2113

Abstract

This work presents a novel two-axis gimbaled mirror for optical scanning applications. This scanner has been implemented using the molded surface-micromachining and bulk etching release (MOSBE II) process. Thus, the vertical comb-drive actuators are employed to realize the large stroke. The thin-film electrical routings are employed to drive the actuators individually. The rib-reinforced structures are exploited to increase the stiffness of mirror plate and supporting frame. In addition, the moving space created by backside deep reactive ion etching enables the mirror to perform large out-of-plane angular motion. The measured radius of curvature of reinforced mirror plate is 0.43 m. The maximum scanning angle of two driving axis are plusmn3.8deg at 55 V and plusmn2.4deg at 100 V, respectively. The resonant frequencies associated with the scanning modes are 5.8 and 7.8m kHz, respectively. In addition, the two-dimensional scanning images such as Lissajous patterns are also demonstrated

Keywords

actuators; integrated optics; micromachining; micromirrors; optical fabrication; optical scanners; silicon; sputter etching; thin films; 100 V; 5.8 kHz; 55 V; 7.8 kHz; Lissajous patterns; bulk etching; deep reactive ion etching; gimbaled mirror; mirror plate stiffness; molded surface-micromachining; optical applications; optical scanning; out-of-plane angular motion; poly-Si-based scanner; rib-reinforced structures; scanning modes; thin-film electrical routings; two-axis gimbaled scanner; two-dimensional scanning images; vertical comb-drive actuators; vertical comb-drive scanner; Actuators; Etching; Microelectromechanical systems; Micromechanical devices; Mirrors; Optical films; Resonant frequency; Routing; Silicon; Transistors; Comb drive; MOSBE platform; microelectromechanical systems (MEMS); micromirror; poly-Si micromachining; reinforced structure;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2006.883251

Filename

1705501