Title :
A Novel Six Degrees-of-Freedom Parallel Robot for MEMS Fabrication
Author :
Bamberger, Hagay ; Shoham, Moshe
Author_Institution :
Armament Dev. Authority Ltd, RAFAEL, Haifa
fDate :
4/1/2007 12:00:00 AM
Abstract :
This paper introduces a new architecture of a six degrees-of-freedom parallel robot suitable for microelectromechanical systems (MEMS) fabrication. The robot consists of only revolute joints for the passive joints, and linear actuators located at the base for the active ones, both of which are easier to manufacture in MEMS technology. The hybrid kinematic structure contains three single-loop submechanisms connected in parallel to the moving platform. The solutions of the inverse and direct kinematics problems are presented
Keywords :
actuators; fasteners; industrial manipulators; manipulator kinematics; micromanipulators; MEMS fabrication; hybrid kinematic structure; linear actuators; microelectromechanical systems; passive joints; revolute joints; single-loop submechanisms; six degrees-of-freedom parallel robot; Associate members; Fabrication; Fasteners; Hydraulic actuators; Kinematics; Micromachining; Micromechanical devices; Parallel robots; Robotics and automation; Silicon; Microactuators; microelectromechanical devices; parallel mechanism; robot kinematics;
Journal_Title :
Robotics, IEEE Transactions on
DOI :
10.1109/TRO.2006.889493
