DocumentCode
775221
Title
Particle-in-cell simulation of ion flow through a hole in contact with plasma
Author
Nam, Sang Ki ; Donnelly, Vincent M. ; Economou, Demetre J.
Author_Institution
Dept. of Chem. Eng., Houston Univ., TX, USA
Volume
33
Issue
2
fYear
2005
fDate
4/1/2005 12:00:00 AM
Firstpage
232
Lastpage
233
Abstract
Images from a particle-in-cell (PIC) simulation of ion flow through a hole in contact with plasma are presented. When the hole size is comparable to or larger than the plasma sheath thickness, the emanating ion beam is strongly divergent. In the opposite extreme of small hole size, a collimated ion beam may be extracted.
Keywords
plasma flow; plasma sheaths; plasma simulation; ion beam; ion flow; particle-in-cell simulation; plasma sheath; Computational modeling; Electrons; Ion beams; Particle beams; Plasma applications; Plasma density; Plasma materials processing; Plasma sheaths; Plasma simulation; Radio frequency; Ion angular distribution; ion beams; particle-in-cell; plasma molding; simulation;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2005.845109
Filename
1420412
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