DocumentCode :
775305
Title :
Visualization of interactions between organic polymer surfaces and ion beams obtained from molecular dynamics Simulations
Author :
Yamada, Hideaki ; Hamaguchi, Satoshi
Author_Institution :
Diamond Res. Center, Nat. Inst. of Adv. Ind. Sci. & Technol., Osaka, Japan
Volume :
33
Issue :
2
fYear :
2005
fDate :
4/1/2005 12:00:00 AM
Firstpage :
246
Lastpage :
247
Abstract :
Molecular dynamics simulation combined with sophisticated visualization techniques may be one of the most powerful scientific tools for the study of atomic-level surface reactions during plasma-wall interactions. This paper shows visualization of an organic polymer model substrate before and during molecular beam injections. The classical interatomic potential model functions used in the present work are developed to describe chemical reactions, i.e., formation and breakup of chemical bonds under strongly nonthermal-equilibrium conditions. We have observed that, during beam injections, nonthermal-equilibrium chemical reactions take place in a nano-scale thin layer of the substrate top surface, which determines characteristics of the process, such as etching/deposition rates and selectivity.
Keywords :
bonds (chemical); molecular beams; plasma chemistry; plasma materials processing; plasma simulation; plasma-wall interactions; polymers; potential energy functions; surface chemistry; atomic-level surface reactions; chemical bonds; classical interatomic potential; deposition rates; etching; ion beams; molecular beam injections; molecular dynamics simulations; nanoscale thin layer; nonthermal-equilibrium chemical reactions; organic polymer surface visualization; plasma-wall interactions; selectivity; substrate top surface; Etching; Ion beams; Organic materials; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma simulation; Polymers; Substrates; Visualization; Molecular dynamics simulation; organic polymers; plasma processing;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2005.845358
Filename :
1420419
Link To Document :
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