DocumentCode :
775404
Title :
The One Atmosphere Uniform Glow Discharge Plasma (OAUGDP)—A Platform Technology for the 21st Century
Author :
Roth, J. Reece ; Nourgostar, Sirous ; Bonds, Truman A.
Author_Institution :
Dept. of Electr. & Comput. Eng., Tennessee Univ., Knoxville, TN
Volume :
35
Issue :
2
fYear :
2007
fDate :
4/1/2007 12:00:00 AM
Firstpage :
233
Lastpage :
250
Abstract :
Representatives from many industrial sectors are searching for more economic and ecologically sound technologies to meet regulatory and competitive pressures. Currently, the majority of industrial plasma processing is done with glow discharges at pressures below 10 torr. This tends to limit such applications to high-value items, as a result of the high capital cost of vacuum systems and the production constraints of batch processing. It has long been recognized that glow discharges would play a much larger industrial role if they could be generated at one atmosphere and in ambient air. A promising platform technology for plasma processing across many industrial sectors is the one atmosphere uniform glow discharge plasma (OAUGDP), a nonthermal normal glow discharge that operates in air (and other gases) at room temperature and atmospheric pressure. It generates active species useful for the sterilization, decontamination, and surface energy enhancement of films, fabrics, air filters, metals, and 3-D workpieces. This paper will survey exploratory research and development at the University of Tennessee´s Plasma Sciences Laboratory on eight potential industrial applications of the OAUGDP that can be conducted at one atmosphere and at room temperature with air as the working gas
Keywords :
batch processing (industrial); glow discharges; plasma materials processing; plasma sources; sputter etching; 1 atm; 293 to 298 K; 3D workpieces; air filters; atmospheric pressure; batch processing; decontamination; fabrics; glow discharge plasma; industrial plasma processing; plasma etching; platform technology; room temperature; sterilization; surface energy enhancement; Atmosphere; Atmospheric-pressure plasmas; Costs; Gas industry; Glow discharges; Industrial economics; Plasma applications; Plasma materials processing; Plasma temperature; Power generation economics; Adhesion; Diesel soot removal; EHD; ashing; atmospheric pressure glow discharge; atmospheric pressure plasma; decontamination; electrohydrodynamic flow control; electrohydrodynamics; etching; flue gas remediation; lighting devices; one atmosphere uniform glow discharge plasma (OAUGDP); plasma actuator; plasma illumination; plasma processing; sterilizable air filter; sterilization; wettability;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2007.892711
Filename :
4154902
Link To Document :
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