• DocumentCode
    775446
  • Title

    Treatment of a perfluorocarbon using nonthermal plasma produced by atmospheric streamer corona discharge

  • Author

    Hayashi, Nobuya ; Satoh, Saburoh

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Saga Univ., Japan
  • Volume
    33
  • Issue
    2
  • fYear
    2005
  • fDate
    4/1/2005 12:00:00 AM
  • Firstpage
    274
  • Lastpage
    275
  • Abstract
    A nonthermal plasma produced by streamer corona discharge at atmospheric pressure was investigated for the treatment of perfluorocarbon gas. The effectiveness of fluorocarbon treatment was investigated using mixture gases of Ar or N with CF4. A maximum decomposition rate of 86% and a maximum energy efficiency of 0.6 g/kWh were achieved using the mixture gas of CF4 (1%) and Ar (99%).
  • Keywords
    argon; carbon compounds; corona; dissociation; gas mixtures; nitrogen; plasma chemistry; plasma diagnostics; plasma materials processing; plasma production; CF4-Ar; CF4-N; atmospheric streamer corona discharge; decomposition; energy efficiency; gas mixtures; nonthermal plasma; perfluorocarbon gas treatment; Argon; Atmospheric-pressure plasmas; Corona; Electrodes; Gases; Plasma applications; Plasma devices; Plasma materials processing; Plasma properties; Wires; Atmospheric plasma; fluorocarbon decomposition; streamer corona discharge;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2005.845003
  • Filename
    1420433
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=775446