DocumentCode
775460
Title
Control of Nitrogen Atomic Density and Enthalpy Flow Into Reaction Chamber in
Pulse-Modulated Induction Thermal Plasmas
Author
Tanaka, Yasunori ; Muroya, Takafumi ; Hayashi, Kouhei ; Uesugi, Yoshihiko
Author_Institution
Div. of Electr. Eng. & Comput. Sci., Kanazawa Univ.
Volume
35
Issue
2
fYear
2007
fDate
4/1/2007 12:00:00 AM
Firstpage
197
Lastpage
203
Abstract
Simultaneous control of the nitrogen atomic density and the enthalpy flow onto the specimen installed downstream of the plasma torch was accomplished using Ar/N2 pulse-modulated induction thermal plasmas (PMITPs). Such simultaneous control was difficult to realize because the increasing input power into conventional nonmodulation thermal plasmas increases the number density of the nitrogen atoms, but it also increases the enthalpy flow onto the specimen. The behavior of the excited nitrogen atoms was measured through spectroscopic observation. The specimen´s surface temperature was measured using a radiation thermometer. Then, the net enthalpy flow onto the specimen was estimated. Results showed that the modulation of coil current increases the time-averaged nitrogen atomic density and decreases the time-averaged enthalpy flow during the modulation cycle onto the specimen irradiated by the Ar/N2 PMITP. This result was confirmed by results from the developed 2-D two-temperature chemical nonequilibrium model of the Ar/N2 PMITP
Keywords
argon; enthalpy; nitrogen; plasma chemistry; plasma density; plasma diagnostics; plasma sources; plasma thermodynamics; plasma torches; reaction kinetics theory; Ar-N2; chemical nonequilibrium model; coil current; enthalpy flow; nitrogen atomic density; plasma torch; pulse-modulated induction thermal plasmas; radiation thermometer; surface temperature; Argon; Atomic measurements; Chemicals; Coils; Nitrogen; Plasma density; Plasma measurements; Plasma temperature; Spectroscopy; Temperature measurement; Enthalpy flow; nitrogen atomic density; pulse-modulated induction thermal plasma (PMITP);
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2007.892709
Filename
4154906
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